MEMS device and method of manufacturing same

ABSTRACT

A method of manufacturing a micromachined resonator having a moveable member comprising forming the moveable member from a material having a first concentration of dopants of a first impurity type, depositing a dopant carrier layer on or over at least a portion of the moveable member, wherein the dopant carrier layer includes one or more dopants of the first impurity type, transferring at least a portion of the one or more dopants from the dopant carrier layer to the moveable member, wherein, in response, the concentration of dopants of the first impurity type in the moveable member increases (for example, to greater than 10 19  cm −3 , and preferably between 10 19  cm −3  and 10 21  cm −3 ). The method further includes removing the dopant carrier layer and may include providing an encapsulation structure over the moveable member of the micromachined resonator.

RELATED APPLICATION

This non-provisional application claims priority to U.S. ProvisionalApplication Ser. No. 61/617,389, entitled “MEMS Device and Method ofManufacturing Same”, filed Mar. 29, 2013 and U.S. ProvisionalApplication Ser. No. 61/617,230, entitled “Superdoped Resonators andMethods of Designing and Manufacturing Same”, filed Mar. 29, 2012(hereinafter collectively “the Provisional Applications”); the contentsof the Provisional Applications are incorporated by reference herein, intheir entirety.

INTRODUCTION

In one aspect, the present inventions relate to methods of manufacturingmicroelectromechanical and/or nanoelectromechanical (collectivelyhereinafter “MEMS” or “microelectromechanical”) structures anddevices/systems including same; and more particularly, in one aspect, tomethods of manufacturing a microelectromechanical structure comprisingone or more moveable or resonating members fabricated from highly dopedsemiconductor. In one embodiment, the semiconductor is silicon,germanium or carbon. The semiconductor may also be compound materials,for example, silicon-germanium. The crystalline structure of thesemiconductor material may be monocrystalline or polycrystalline, forinstance monocrystalline silicon or polycrystalline silicon orpolycrystalline carbon. Notably, polycrystalline, as used herein alsorefers to nanocrystalline and other non-monocrystalline material forms,for instance diamond-like carbon. The polycrystalline material may be acompound, for instance polycrystalline silicon germanium.

In one embodiment, the one or more moveable or resonating members may befabricated from monocrystalline silicon having doping concentrationsgreater than 10¹⁵ cm⁻³, and preferably, between 10¹⁵ cm⁻³ and 10²¹ cm⁻³.In another embodiment, the one or more moveable or resonating members ofthe microelectromechanical structure may be fabricated frommonocrystalline silicon having doping concentrations greater than 10¹⁹cm⁻³, and preferably, between 10¹⁹ cm⁻³ and 10²¹ cm⁻³. In a furtherembodiment, the material may be polycrystalline silicon doped in similarranges. Such doping concentrations may provide predetermined temperaturecoefficients of frequency of the moveable or resonating members of thestructures.

In the case of a monocrystalline material, when the movable orresonating structures are fabricated at specific angles relative to theorientation of the crystal planes of the material they can have specificor predetermined temperature sensitivity that is a function of theangles and the shape of the structure. Specifically, when the movablestructures or resonators are fabricated in highly doped monocrystallinematerial, they can provide, in operation, both positive and negativetemperature coefficients of frequency.

Notably, most semiconductor starting materials (or wafers) include aninitial dopant at a predetermined concentration. Those semiconductorstarting materials that are not initially doped with an impurity areoften referred to as “intrinsic”. This initial or “background”concentration of impurities sets the carrier type of the material (e.g.n-type or p-type). The carrier type may be maintained with the higherdoping of the same type or can be reversed by doping with a higher levelof opposite type, often referred to as counter-doping.

The present inventions may employ any dopant to provide the highly dopedsemiconductor (for example, monocrystalline silicon). In one embodiment,for example, the dopant provides excess n-type carriers in the moveableor resonating members of the microelectromechanical structure (forexample, one or more elements of Group 15 of the periodic table—such asphosphorous, arsenic and/or antimony). In another embodiment the dopantprovides excess p-type carriers in the moveable or resonating members(for example, one or more elements of Group 13 of the periodictable—such as boron, gallium and/or indium).

The dopant type and/or doping levels may be selected to provide apredetermined sensitivity of the temperature dependent characteristicsof the moveable or resonating members of the microelectromechanicalstructure. For example, in one embodiment, the dopant type and/or dopinglevels of the silicon significantly reduce the sensitivity of one ormore temperature dependent characteristic of the microelectromechanicalstructure. In this regard, in most implementations, the resonancefrequency of the MEMS resonator should remain substantially stable overa range of operating temperatures. This, however, will not typically bethe case as thermally induced changes to the Young's modulus (or othervariables) tend to change in the mechanical stiffness of the structure.That is, thermally-induced changes to the Young's modulus tend to causeconsiderable variation or change in the frequency of the output of theresonator (this change with temperature is sometimes referred to as“drift” or “temperature drift”).

Material dimensions and density are examples of other parameters thatmay change with temperature. Moreover, the MEMS device may be designedand manufactured to, and in operation, compensate the Young's modulus sothat the MEMS device varies with temperature in such a predeterminedmanner as to balance other changes with temperature to minimize and/orcontrol the total or net change. Electronic parameters of the oscillatorcircuit may also case temperature sensitivity of frequency, and thesetoo may be compensated in some embodiments. Therefore, the system may becompensated as a whole with resonator doping to produce the desiredbehavior over temperate.

In another embodiment, the dopant type and/or doping levels may beselected to provide predetermined manufacturing controllability and/ortolerances of the doping operation to reduce and/or control thesensitivity of the temperature dependent characteristics of the one ormore moveable or resonating members of the microelectromechanicalstructure. For example, in this embodiment, although the dopant and/ordoping levels do not provide a maximum reduction in the sensitivity ofthe temperature dependent characteristic of the moveable or resonatingmembers, such dopant type(s) and/or levels provide a sensitivity of thetemperature dependent characteristic (for example, temperaturecoefficient of frequency) over manufacturing variations or tolerances indoping operations or concentrations which is within a predeterminedrange or limits.

The sensitivity to temperature may be optimized to be small or of apreferred magnitude. For instance a device with a small temperaturesensitivity may be advantageous as a reference device whereas one with alarger sensitivity may be advantageous as a temperature sensor.

Notably, in one embodiment, the doping processes (which may employmultiple masking processes) of the moveable or resonating members of themicroelectromechanical structure may include a plurality of dopant typesand/or a plurality of doping levels, which, in sum, provide a net dopingconcentration of a predetermined type. For example, the doping processesmay include (i) a first dopant type, having a first type of carriers, atfirst doping level and (ii) a second dopant type, also having the firsttype of carriers, at a second doping level. Here, the doping processesprovide a net doping concentration (which is within a predeterminedrange) of a predetermined type.

In another embodiment, the doping processes may include counter-dopingwhich includes (i) a first dopant type, having a first type of carriers,at first doping level and (ii) a second dopant type, having a secondtype of carriers which are opposite the first type of carriers, at asecond doping level. In the context of counter-doping, the dominantdopant type and the net doping concentration of the moveable orresonating members of the microelectromechanical structure depend on,among other things, the dopant types and the doping levels of suchimpurities. Indeed, in another embodiment, the doping processes of themoveable or resonating members of the microelectromechanical structure(which may employ multiple masking processes) may provide a first regionof the moveable or resonating members having first dopant type(s) and/orfirst doping level(s), and a second region of the moveable or resonatingmembers having second dopant type(s) and/or second doping level(s).Here, a portion of the moveable or resonating member may be highly dopedwith the first dopant type (having the first type of carriers) andanother portion of the moveable or resonating member may be highly dopedwith the second dopant type (having the second type of carriers—which isopposite the first type of carriers).

In another embodiment, the doping process(es) may be “patterned” so thatone or more first regions or structures of a MEMS device are doped to afirst impurity concentration level and one or more other regions orstructures of the device are substantially maintained at backgrounddoping level and/or at an impurity concentration level that is/aredifferent from the first region(s) or structure(s). Here, one or moreregions/portions of a structure may be doped to a first impurityconcentration level while other regions/portions of the structure arenot doped and/or are doped differently (for example, a differentimpurity, impurity level, different gradient and/or impurity type) sothat one structure of the device is fabricated from the highly dopedsemiconductor and another structure is not fabricated from substantiallythe same highly doped semiconductor (for example, such other structuremay be fabricated from material having a impurity concentration that issubstantially at the background doping level). In another embodiment,the doping process(es) may be uniform but the structures may have varieddimensions, shapes, proportions, orientations and/or resonant modes. Inthis way the structures may have different temperature behaviors or maybehave differently in other ways. Indeed, the structures need not all beresonators, but can have mixed functions, for instance resonators andthermistors.

BRIEF DESCRIPTION OF THE DRAWINGS

In the course of the detailed description to follow, reference will bemade to the attached drawings. These drawings show different aspects ofthe present inventions and, where appropriate, reference numeralsillustrating like structures, components, materials and/or devices indifferent figures are labeled similarly. It is understood that variouscombinations of the structures, components, and/or devices, other thanthose specifically shown, are contemplated and are within the scope ofthe present inventions.

Moreover, there are many inventions described and illustrated herein.The present inventions are neither limited to any single aspect norembodiment thereof, nor to any combinations and/or permutations of suchaspects and/or embodiments. Moreover, each of the aspects of the presentinventions, and/or embodiments thereof, may be employed alone or incombination with one or more of the other aspects of the presentinventions and/or embodiments thereof. For the sake of brevity, certainpermutations and combinations are not discussed and/or illustratedseparately herein.

FIG. 1 illustrates a block diagram representation of amicroelectromechanical structures (for example, one or more gyroscopes,resonators and/or accelerometers) manufactured according to the presentinventions;

FIG. 2 illustrates a top view of an exemplary microelectromechanicalstructure according to certain aspects and embodiments of the presentinventions wherein the exemplary microelectromechanical structureincludes moveable members and stationary members (for example, driveand/or sense electrodes) or field areas (hereinafter, collectively,“stationary members”); notably, the present inventions are applicable toany microelectromechanical structure, including structures where it isadvantageous and/or desirable to provide, manage and/or control thesensitivity of the temperature dependent characteristics of themicroelectromechanical structure;

FIGS. 3A-3F illustrate cross-sectional views of a portion of theexemplary microelectromechanical structure of FIG. 2 (along dotted lineA-A) at various stages of manufacturing, in accordance with certainaspects and/or embodiments of the present inventions, wherein FIG. 3Aillustrates a cross-sectional view of substrate prior to formation ofthe microelectromechanical structure (wherein in this exemplaryillustration, the starting substrate may be asemiconductor-on-insulator), FIG. 3B illustrates a cross-sectional viewof the microelectromechanical structure after definition or formation(using, for example, well-known lithographic and etching techniques),FIG. 3C illustrates the forming, depositing and/or growing a dopantcarrier layer on the moveable or resonating members of themicroelectromechanical structure, FIG. 3D illustrates transformation ofthe semiconductor material of the moveable or resonating members to ahighly doped semiconductor material (for example, by transferring and/ordriving in impurities from the dopant carrier layer to the semiconductormaterial of the moveable or resonating members via thermal annealing orheating), FIG. 3E illustrates the moveable or resonating member afterremoval of dopant carrier layer thereby providing moveable or resonatingmember comprising a semiconductor material having a high concentrationof impurities (for example, a highly doped monocrystalline silicon), andFIG. 3F illustrates release of the moveable member of themicroelectromechanical structure via removal of a sacrificial layer ofthe substrate, in accordance with certain aspects and/or embodiments ofthe present inventions;

FIG. 4A illustrates a cross-sectional view, along dotted line A-A, ofthe exemplary microelectromechanical structure illustrated in FIG. 2wherein the exemplary microelectromechanical structure is disposed in acavity via thin-film encapsulation structure, in accordance with certainaspects and/or embodiments of the present inventions;

FIG. 4B illustrates a cross-sectional view, along dotted line A-A, ofthe exemplary microelectromechanical structure illustrated in FIG. 2wherein the exemplary microelectromechanical structure is sealed, forexample, in a TO-8 “can” (or like structure) and/or in a cavity via asilicon glass substrate or wafer bonded to the microelectromechanicalstructure die or substrate, in accordance with certain aspects and/orembodiments of the present inventions;

FIGS. 5A-5D illustrate cross-sectional views, along dotted line A-A ofthe exemplary microelectromechanical structure illustrated in FIG. 2, atvarious stages of manufacturing, in accordance with certain aspectsand/or embodiments of the present inventions, wherein FIG. 5Aillustrates a cross-sectional view of the microelectromechanicalstructure after transfer of impurities from the dopant carrier layer tothe moveable or resonating members and prior to release of such membersfrom the substrate (for example, according to the process illustrated inFIGS. 3A-3E, and the text associated therewith), and after providing ordepositing a sacrificial layer on the microelectromechanical structure,FIG. 5B illustrates a cross-sectional view after forming, depositing,growing and/or providing an encapsulation layer on and/or oversacrificial layer and prior to release of the microelectromechanicalstructure from the substrate (via removal or etching of the sacrificiallayer from around the microelectromechanical structure), and FIG. 5Cillustrates a cross-sectional view after releasing of themicroelectromechanical structure from the substrate wherein thesacrificial layers are removed or etched from aroundmicroelectromechanical structure thereby substantially or entirelyreleasing (vertically and horizontally) the moveable or resonatingmembers of the microelectromechanical structure; in one embodiment, thevents are closed and the cavity sealed after releasingmicroelectromechanical structure, for example, via deposition forming,depositing, growing and/or providing another encapsulation layer (seeFIG. 5D); notably, in one embodiment, vents (not illustrated in thisseries of figures) are formed in encapsulation layer wherein thesacrificial layer is removed around microelectromechanical structure,via the vents, using well known processing techniques;

FIGS. 5E-5G illustrate cross-sectional views, along dotted line A-A ofthe exemplary microelectromechanical structure illustrated in FIG. 2, atvarious stages of manufacturing, in accordance with certain aspectsand/or embodiments of the present inventions, wherein the dopant carrierlayer is removed concurrently with sacrificial layers; FIG. 5Eillustrates a cross-sectional view of the microelectromechanicalstructure after providing or depositing a sacrificial layer on thedopant transfer layer, FIG. 5F illustrates a cross-sectional view afterreleasing of the microelectromechanical structure from the substratewherein the sacrificial layers and the dopant carrier layer are removedor etched thereby substantially or entirely releasing (vertically andhorizontally) the moveable or resonating members of themicroelectromechanical structure; in one embodiment, the vents areclosed and the cavity sealed after releasing microelectromechanicalstructure, for example, via deposition forming, depositing, growingand/or providing another encapsulation layer (see FIG. 5G); again, thevents (not illustrated in this series of figures) may be formed inencapsulation layer and the sacrificial layer is removed or etchedaround microelectromechanical structure using well known processingtechniques;

FIGS. 6A-6D illustrate cross-sectional views of a portion of theexemplary microelectromechanical structure of FIG. 2 (along dotted lineA-A) at various stages of manufacturing using a substrate of FIG. 3A andthe microelectromechanical structure defined or formed as in FIG. 3B, inaccordance with certain aspects and/or embodiments of the presentinventions, wherein FIG. 6A illustrates the forming, depositing and/orgrowing a dopant carrier layer on the moveable or resonating members ofthe microelectromechanical structure, FIG. 6B illustrates transformationof a portion of the semiconductor material of the moveable or resonatingmembers to a highly doped semiconductor material (for example, bytransferring and/or driving in impurities from the dopant carrier layerto the semiconductor material of the moveable or resonating members viathermal annealing or heating) thereby providing a portion that is highlydoped via transfer of dopants from the carrier layer and a portion thatis substantially unaffected by the dopants from the carrier layer, FIG.6C illustrates a cross-sectional view after removal of the dopantcarrier layer from the moveable or resonating members of themicroelectromechanical structure, and FIG. 6D illustrates the moveablemember of the microelectromechanical structure after release from thesubstrate via removal of a sacrificial layer of the substrate, inaccordance with certain aspects and/or embodiments of the presentinventions;

FIG. 7 illustrates a top view of an exemplary microelectromechanicalstructure according to certain aspects and embodiments of the presentinventions wherein the exemplary microelectromechanical structureincludes moveable members and stationary members (for example, driveand/or sense electrodes), and/or field area (as noted above, suchfeatures are collectively described hereinafter as “stationarymembers”); notably, a moveable member of the structure may be fabricatedfrom a highly doped semiconductor (for example, silicon) havingdifferent gradients of doping than a different moveable members of thestructure;

FIG. 8 is a graphical illustration of a relationship of an impuritydoping concentration in silicon versus temperature coefficient offrequency (TCF) for silicon, wherein the dashed arrows reflect potentialchanges in TCF due to changes in impurity concentrations within thematerial of the includes moveable or resonating members of an exemplarymicroelectromechanical structure;

FIG. 9 illustrates a top view of an exemplary microelectromechanicalstructure according to certain aspects and embodiments of the presentinventions wherein the exemplary microelectromechanical structureincludes one or more moveable members fabricated from a highly dopedsemiconductor having a first doping density (of a first dopant type) andone or more moveable members having a doping density (of the firstdopant type) which is different from the first doping density;

FIGS. 10A-10D illustrate cross-sectional views of a portion of theexemplary microelectromechanical structure of FIG. 9 (along dotted lineA-A) at various stages of manufacturing using a substrate of FIG. 3A andthe microelectromechanical structure defined or formed as in FIG. 3B, inaccordance with certain aspects and/or embodiments of the presentinventions, wherein FIG. 10A illustrates the forming, depositing and/orgrowing a dopant carrier layer on the moveable or resonating members ofthe microelectromechanical structure and FIG. 10B illustratestransformation of a portion of the semiconductor material of themoveable or resonating members to a highly doped semiconductor material(for example, by transferring and/or driving in impurities from thedopant carrier layer to the semiconductor material of the moveable orresonating members, for example, via thermal annealing or heating)thereby providing moveable or resonating members having different dopingconcentrations, in accordance with certain aspects and/or embodiments ofthe present inventions, FIG. 10C illustrates a cross-sectional viewafter removal or etching of the dopant carrier layer from the moveableor resonating members of the microelectromechanical structure, and FIG.10D illustrates the moveable member of the microelectromechanicalstructure after release from the substrate via removal of a sacrificiallayer of the substrate, in accordance with certain aspects and/orembodiments of the present inventions;

FIGS. 11A-11D illustrate cross-sectional views of a portion of theexemplary microelectromechanical structure of FIG. 2 (along dotted lineA-A) at various stages of manufacturing using a substrate of FIG. 3A andthe microelectromechanical structure defined or formed as in FIG. 3B, inaccordance with certain aspects and/or embodiments of the presentinventions, wherein FIG. 11A illustrates a cross-sectional view afterreleasing of the microelectromechanical structure from the substratewherein the sacrificial layer is removed or etched thereby substantiallyor entirely releasing (vertically and horizontally) the moveable orresonating members of the microelectromechanical structure, FIG. 11Billustrates forming, depositing and/or growing a dopant carrier layer onthe moveable or resonating members of the microelectromechanicalstructure, FIG. 11C illustrates transformation of a portion of thesemiconductor material of the moveable or resonating members to a highlydoped semiconductor material (for example, by transferring and/ordriving in impurities from the dopant carrier layer to the semiconductormaterial of the moveable or resonating members via thermal annealing orheating) thereby providing a portion that is highly doped via transferof dopants from the carrier layer and a portion that is substantiallyunaffected by the dopants from the carrier layer, and FIG. 11Dillustrates a cross-sectional view after removal or etching of thedopant carrier layer from the moveable or resonating members of themicroelectromechanical structure;

FIG. 12A illustrates a MEMS device including one or moremicroelectromechanical structures (for example, one or more gyroscopes,resonators and/or accelerometers), manufactured in accordance withaspects and/or embodiments of the present inventions, and fabricated,manufactured or integrated on a die with a circuitry;

FIG. 12B illustrates a MEMS device and thermistor having one or moremicromachined thermistor structures (in accordance with aspects and/orembodiments of the inventions of Provisional Application Ser. No.61/533,148, which is incorporated in its entirety herein by reference)fabricated, manufactured or integrated on a die with a circuitry,wherein the MEMS device is fabricated using the techniques/embodimentsof the present inventions and the thermistor structures may befabricated using or include any of the aspects and/or embodiments of theinventions of Provisional Application Ser. No. 61/533,148;

FIG. 12C illustrates a MEMS device and circuitry (which may be relatedto, employed to operate and/or distinct from the MEMS device) disposedor integrated on a die, wherein the MEMS device is fabricated using thetechniques/embodiments of the present inventions; notably, theintegrated circuitry may be fabricated during, before and or aftermanufacture/fabrication of the MEMS device;

FIG. 12D illustrates a die containing a MEMS device, a thermistor havingone or more micromachined thermistor structures (as described above) andintegrated circuitry (as described above);

FIGS. 12E and 12F illustrate a die containing a MEMS device and atemperature sensing diode;

FIG. 13 illustrates a cross-sectional view of an exemplarymicroelectromechanical structure wherein the exemplarymicroelectromechanical structure is disposed in a cavity via thin-filmencapsulation structure and a temperature sensing diode is disposed infield region which is laterally displaced from themicroelectromechanical structure (see, for example, FIGS. 12E and 12F),in accordance with certain aspects and/or embodiments of the presentinventions;

FIGS. 14A and 14B illustrate cross-sectional views of a portion of theexemplary microelectromechanical structure of FIG. 2 (along dotted lineA-A) at various stages of manufacturing using a substrate of FIG. 3A andthe microelectromechanical structure defined or formed as in FIG. 3B, inaccordance with certain aspects and/or embodiments of the presentinventions, wherein FIG. 14A illustrates transformation of a portion ofthe semiconductor material of the moveable or resonating members to ahighly doped semiconductor material (for example, by transferring and/ordriving in impurities from the dopant carrier layer to the semiconductormaterial of the moveable or resonating members, for example, via thermalannealing or heating) thereby providing a portion that is highly dopedvia transfer of dopants from the carrier layer and a portion that issubstantially unaffected by the dopants from the carrier layer, and FIG.14B illustrates the moveable or resonating member after removal ofdopant carrier layer and release of the moveable member of themicroelectromechanical structure via removal of a sacrificial layer ofthe substrate, wherein the removal of the dopant carrier layer andrelease of the moveable or resonating members are performedsubstantially concurrently using the substantially the same process andetch materials, in accordance with certain aspects and/or embodiments ofthe present inventions;

FIGS. 15A-15D illustrate cross-sectional views of a portion of theexemplary microelectromechanical structure of FIG. 2 (along dotted lineA-A) at various stages of manufacturing using a substrate of FIG. 3A, inaccordance with certain aspects and/or embodiments of the presentinventions, wherein FIG. 15A illustrates a cross-sectional view of themicroelectromechanical structure after definition or formation (using,for example, well-known lithographic and etching techniques—see, forexample, FIG. 3B) and forming, depositing and/or growing a dopantcarrier layer on the moveable or resonating members of themicroelectromechanical structure, FIG. 15B illustrates impurity dopantof the dopant carrier layer at the surface of the moveable members afterremoval of the dopant carrier layer but before the dopant is driven fromthe surface of the moveable members into substantial portions of thesemiconductor material of the moveable members via, for example,thermally annealing and/or heating and thereby substantially increasingthe doping concentrations of a significant portion of the semiconductormaterial of the moveable members, FIG. 15C illustrates transformation ofthe semiconductor material of the moveable or resonating members to ahighly doped semiconductor material (for example, by transferring and/ordriving-in the dopant impurities from the surface of the semiconductormaterial of the moveable members, and FIG. 15D illustrates release ofthe moveable member of the microelectromechanical structure via removalof a sacrificial layer of the substrate, in accordance with certainaspects and/or embodiments of the present inventions;

FIG. 16 illustrates a top view of an exemplary microelectromechanicalstructure according to certain aspects and embodiments of the presentinventions wherein the exemplary microelectromechanical structureincludes moveable or resonating members and stationary members (forexample, drive and/or sense electrodes) or field areas (hereinafter,collectively, “stationary members”) and wherein the moveable membersincludes one or more slots therein to, for example, provide for morethorough doping of the moveable or reasoning members; and

FIGS. 17A-17E illustrate cross-sectional views of a portion of theexemplary microelectromechanical structure of FIG. 2 (along dotted lineA-A) at various stages of manufacturing using a substrate of FIG. 3A, inaccordance with certain aspects and/or embodiments of the presentinventions, wherein FIG. 17A illustrates a cross-sectional view of themicroelectromechanical structure after definition or formation (using,for example, well-known lithographic and etching techniques), FIG. 17Billustrates the forming, depositing and/or growing a dopant carrierlayer on the moveable or resonating members of themicroelectromechanical structure, FIG. 17C illustrates transformation ofthe semiconductor material of the moveable or resonating members to ahighly doped semiconductor material (for example, by transferring and/ordriving in impurities from the dopant carrier layer to the semiconductormaterial of the moveable or resonating members via thermal annealing orheating), FIG. 17D illustrates the moveable or resonating member afterremoval of dopant carrier layer thereby providing moveable or resonatingmember comprising a semiconductor material having a high concentrationof impurities (for example, a highly doped monocrystalline silicon), andFIG. 17E illustrates release of the moveable member of themicroelectromechanical structure via removal of a sacrificial layer ofthe substrate, in accordance with certain aspects and/or embodiments ofthe present inventions;

FIG. 18 illustrates a top view of an exemplary microelectromechanicalstructure according to certain aspects and embodiments of the presentinventions wherein the exemplary microelectromechanical structureincludes one or more moveable members fabricated from highly dopedsemiconductor, wherein one or more of the moveable members include afirst portion having a first width and first doping density and a secondportion having a second width and a second doping density;

FIG. 19A illustrate cross-sectional view, along dotted line A-A, of aportion of the exemplary microelectromechanical structure of FIG. 18 (inparticular, the first portion of the moveable member having the firstwidth and the first doping density) after manufacturing in accordancewith, for example, any of the processes described herein;

FIG. 19B illustrate cross-sectional view, along dotted line B-B, of aportion of the exemplary microelectromechanical structure of FIG. 18 (inparticular, the second portion of the moveable member having the secondwidth and the second doping density) after manufacturing in accordancewith, for example, any of the processes described herein;

FIGS. 20A-20F illustrate cross-sectional views of a portion of theexemplary microelectromechanical structure of FIG. 2 (along dotted lineA-A) at various stages of manufacturing, in accordance with certainaspects and/or embodiments of the present inventions, wherein FIG. 20Aillustrates a cross-sectional view of substrate prior to formation ofthe microelectromechanical structure (wherein in this exemplaryillustration, the starting substrate may be asemiconductor-on-insulator) wherein the active substrate includes afirst, background and/or initial doping concentration, FIG. 20Billustrates a cross-sectional view of the microelectromechanicalstructure after definition or formation (using, for example, well-knownlithographic and etching techniques), FIG. 20C illustrates the forming,depositing and/or growing an impurity removal or absorption layer on themoveable or resonating members of the microelectromechanical structure,FIG. 20D illustrates transformation of the semiconductor material of themoveable or resonating members by removing impurities from thesemiconductor material (for example, via thermal annealing or heating),FIG. 20E illustrates the moveable or resonating member after removal ofimpurity removal layer thereby providing moveable or resonating membercomprising a semiconductor material having a high concentration ofimpurities (for example, a highly doped monocrystalline silicon), andFIG. 20F illustrates release of the moveable member of themicroelectromechanical structure via removal of a sacrificial layer ofthe substrate, in accordance with certain aspects and/or embodiments ofthe present inventions;

FIGS. 21A-21E illustrate cross-sectional views of an exemplary processsequence that dopes the structure 16 in a vertically symmetrical way;and

FIGS. 22A-22D illustrate cross-sectional views of another exemplaryprocess sequence that dopes the structure 16 in a vertically symmetricalway; notably, there may be benefits to keeping the structure 16symmetrical; that is, with the same or similar dopant concentrationprofiles at the top and the bottom of structure 16; for instance doingthis may balance the stress on the structure that may be associated withthe doping, and thereby help keep the structure from warping up or down.

Again, there are many inventions described and illustrated herein. Thepresent inventions are neither limited to any single aspect norembodiment thereof, nor to any combinations and/or permutations of suchaspects and/or embodiments. Each of the aspects of the presentinventions, and/or embodiments thereof, may be employed alone or incombination with one or more of the other aspects of the presentinventions and/or embodiments thereof. For the sake of brevity, many ofthose combinations and permutations are not discussed separately herein.

DETAILED DESCRIPTION

At the outset, it should be noted that there are many inventionsdescribed and illustrated herein. The present inventions are neitherlimited to any single aspect nor embodiment thereof, nor to anycombinations and/or permutations of such aspects and/or embodiments.Moreover, each of the aspects of the present inventions, and/orembodiments thereof, may be employed alone or in combination with one ormore of the other aspects of the present inventions and/or embodimentsthereof. For the sake of brevity, many of those permutations andcombinations will not be discussed separately herein.

Further, in the course of describing and illustrating the presentinventions, various architectures, structures, components, functionsand/or elements, as well as combinations and/or permutations thereof,are set forth. It should be understood that architectures, structures,components, functions and/or elements other than those specificallydescribed and illustrated, are contemplated and are within the scope ofthe present inventions, as well as combinations and/or permutationsthereof.

With that in mind, in one aspect, the present inventions are directed toa method of manufacturing a microelectromechanical structure having oneor more moveable or resonating members. The method of manufacturefabricates moveable or resonating members from a substrate (for example,monocrystalline silicon) having a first dopant concentration, using, forexample, conventional lithographic and etching techniques. Afterformation of one or more of the moveable or resonating members, themethod of the present inventions deposits, forms, grows and/or providesa dopant carrier layer on the moveable or resonating members. The dopantcarrier layer includes n-type or p-type impurities to be incorporatedinto the material of the moveable or resonating members to substantiallyincrease the impurity doping concentrations of the material of themoveable or resonating members by at least one order of magnitude. Inthis way, the sensitivity of temperature dependent characteristics ofthe one or more moveable or resonating members of themicroelectromechanical structure is/are reduced, controlled and/ormaintained within a predetermined range.

The present inventions may employ any impurity dopant to provide ahighly doped semiconductor material of the moveable or resonatingmembers. For example, in one embodiment, the dopant provides excessiven-type carriers in the moveable or resonating members (for example, oneor more elements of Group 15 of the periodic table—such as phosphorous,arsenic and/or antimony). In another embodiment, the dopant providesexcessive p-type carriers in the moveable or resonating members (forexample, one or more elements of Group 13 of the periodic table—such asboron, gallium and/or indium).

The impurity dopant in the dopant carrier layer, during and/or afterdepositing, forming, growing and/or providing the dopant carrier layeron the moveable or resonating members, is transferred from the dopantcarrier layer and to the semiconductor material (for example,monocrystalline silicon) of the moveable or resonating members. In oneembodiment, after the dopant carrier layer is deposited on thesemiconductor material of the moveable or resonating members, the dopantin the carrier layer is transferred into the semiconductor material ofthe moveable or resonating members, via thermally annealing and/orheating, to substantially increase the doping concentrations of thesemiconductor material of the moveable or resonating members and therebyreduce and/or control the sensitivity of the temperature dependentcharacteristics of the one or more moveable or resonating members of themicroelectromechanical structure. For example, in one embodiment, wherethe semiconductor material of the moveable or resonating members isformed from monocrystalline silicon and includes an initial n-typeimpurity concentration of about 10¹³ cm⁻³, the present inventionsincrease the n-type impurity concentration of the monocrystallinesilicon of significant portions of the one or more moveable orresonating members to greater than 10¹⁵ cm⁻³ (and preferably, between10¹⁵ cm⁻³ and 10²¹ cm⁻³), and more preferably, to greater than 10¹⁹ cm⁻³(and preferably, between 10¹⁹ cm⁻³ and 10²¹ cm⁻³). Indeed, in yetanother embodiment, where the semiconductor material of the moveable orresonating members is formed from monocrystalline silicon and includesan initial n-type impurity concentration of about 10¹⁹ cm⁻³, the presentinventions increase the n-type impurity concentration of themonocrystalline silicon of the one or more moveable or resonatingmembers to greater than 6×10¹⁹ cm⁻³, and preferably between 10²⁰ cm⁻³and 10²¹ cm⁻³ (i.e., between one-half and two orders of magnitude).

Of course, the aforementioned impurity concentrations are exemplary andthe maximum concentration may exceed 10²¹ cm⁻³. The concentration mayeven be at or above the solid-solubility limit. If it is above thesolid-solubility limit the dopant may form precipitates, which may be anacceptable condition. The discussion herein of a preferable dopant rangedoes not preclude higher levels. Indeed, if higher levels are found tobe advantageous they can be formed as described herein. Values providedhere should not be considered limiting to the fabrication processesdescribed here but only exemplary of the values that are presently knownto be advantageous. Any concentrations and especially highconcentrations of dopant, weather now known to be useful or laterdetermined to be so are considered within the scope of this work.Notably, in another exemplary embodiment, after depositing the dopantcarrier layer on the moveable or resonating members—but before thedopant is driven into significant portions of the semiconductor materialof the moveable or resonating members, the dopant carrier layer isremoved from the moveable or resonating members. In this embodiment, thedopant is driven into the semiconductor material of the moveable orresonating members during or after removal of the dopant carrier layer,for example, via thermally annealing and/or heating. In this way, thedoping concentrations of a significant portion of the semiconductormaterial of the moveable or resonating members are substantiallyincreased. Here, the dopant from the dopant carrier layer is transferredto the exposed surface of the semiconductor material of the moveable orresonating members during deposition of the dopant carrier layer—and,after removal of the dopant carrier layer, the dopant which issubstantially at the surface of the semiconductor material of themoveable or resonating members is driven deeper into the semiconductormaterial of the moveable or resonating members (via, for example,thermally annealing and/or heating) to thereby reduce and/or control thesensitivity of the temperature dependent characteristics of the one ormore moveable or resonating members of the microelectromechanicalstructure.

With reference to FIGS. 1 and 2, in one embodiment, MEMS device 10includes microelectromechanical structure 12 which is fabricated orformed in and/or on from substrate 14, for example, a semiconductor oninsulator (SOI) substrate (for example, silicon or germaniumregion/layer/material disposed on or over an insulatorregion/layer/material (for example, a silicon oxide, silicon nitrideand/or combination thereof)) or silicon, (for example, a standard bulksilicon), silicon-germanium, gallium-arsenide. Themicroelectromechanical structure 12 may include one or more moveable orresonating members and one or more stationary members (for example,drive and/or sense electrodes) and/or field areas (as noted above, suchfeatures are collectively described hereinafter as “stationarymembers”). In this illustrated exemplary embodiment,microelectromechanical structure 12 includes two moveable or resonatingmembers 16 (which are illustrated as moving in-plane—see D) and aplurality of stationary members 18 a and 18 b (for example sense and/ordrive electrodes) to induce and/or sense the motion of moveable orresonating members 16. It should be noted that microelectromechanicalstructure 12 may include any shape, architecture and/or configurationnow known or later developed.

Note that the structure may be a resonator and may be another mechanicalor electrical component. Indeed, the structure may be a gyroscope, anaccelerometer, a pressure sensor, a microphone, a light sensor, or anyof a wide range of devices.

With reference to FIGS. 3A and 3B, the manufacture ofmicroelectromechanical structure 12, in one exemplary embodiment,includes forming or fabricating moveable or resonating member 16 from asemiconductor on insulator (SOI) substrate 14 having a silicon layer 14c disposed on an insulating or sacrificial layer 14 b, which is disposedon a “handle” layer 14 a (for example, silicon). In this exemplaryembodiment, silicon layer 14 c may be monocrystalline silicon having afirst concentration of n-type impurities (for example, an n-typeimpurity concentration of about 10¹³ cm⁻³). The moveable or resonatingmember 16 may be formed or fabricated in substrate 14 c usingconventional lithographic and etching techniques (see channels 20 whichdefines the moveable or resonating member 16). Indeed, any technique,now known or later developed, may be employed to form or fabricatemoveable or resonating member 16 and stationary members 18.

After initially defining or forming one or more of the moveable orresonating members (and, in this exemplary embodiment, the stationarymembers 18), with reference to FIG. 3C, the method of the presentinventions deposits, forms, grows and/or provides dopant carrier layer22 on moveable or resonating members 16. The dopant carrier layer 22includes one or more dopants and/or dopant types (n-type or p-typeimpurities) which are to be incorporated into moveable or resonatingmembers 16. In this exemplary embodiment, dopant carrier layer 22 may bephosphorus oxychloride (POCl₃) which is employed as a source ofphosphorus (an n-type impurity) to increase the concentration of dopantor impurities in the material of moveable or resonating members 16.

In another embodiment, phosphorus doped silicon glass, PSG, orphosphorus doped spin on glass, SOG may be employed to form carrierlayer 22. Similarly, analogs of these with other doping types may bepossible.

The carrier layer 22 may or may not fill the trenches and bridge thegaps. When the thickness of carrier layer 22 is large compared to thetrench or gap with, as it often is with SOG, then the carrier layer 22may tend to fill the trenches.

In another embodiment, dopant carrier layer 22 may be a boron dopedglass (for example, BSG) which may also be employed as a phosphorussource to increase the amount of dopant in the material of moveable orresonating members 16. In yet another embodiment, the dopant source inthe dopant carrier layer 22 may include arsenic—for example, indiumarsenide, gallium arsenide, aluminum arsenide or combinations thereof(for example, indium gallium arsenide). Indeed, dopant carrier layer 22may include any material having one or more dopants and/or dopant types(n-type or p-type impurities) which, during and/or after deposition onthe moveable or resonating members 16 is transferred (concurrently orsubsequently to layer formation) to the material of moveable orresonating members 16.

With reference to FIG. 3D, during and/or after providing, depositing,forming and/or growing dopant carrier layer 22 on moveable or resonatingmembers 16, the dopants in dopant carrier layer 22 is transferred to ordriven into moveable or resonating members 16 (which after transfer ordrive-in portions are identified as 16″ to reflect or indicate anincrease in concentration of dopant within such portion of the materialof members 16). In one embodiment, thermally annealing or heating isemployed to induce the transfer of the n-type or p-type impurities. Forexample, where dopant carrier layer 22 is POCl₃ and the material ofmoveable or resonating members 16 is silicon, the phosphorous in thePOCl₃ dopant carrier layer 22 is transferred from layer 22 to thematerial of moveable or resonating members 16 thereby increasing theconcentration of n-type dopants by one or more orders of magnitude (andpreferably, 2-8 orders of magnitude, and more preferably, 6-8 order ofmagnitude) of the concentration of n-type dopants in the material ofmoveable or resonating members 16. Indeed, where the base or initialimpurity concentration of the material of moveable or resonating members16 includes an initial n-type impurity concentration of about 10¹⁹ cm⁻³,the increase of the concentration of n-type impurity dopants may bebetween one-half and two orders of magnitude.

The thickness of the dopant carrier layer 22 may be selected based on,among other things, the amount of dopant to be introduced into thematerial of moveable or resonating members 16, the transfer or drivenprocesses and/or parameters (for example, the amount of time, atmosphereand/or temperature employed to drive in or transfer the dopant from thecarrier layer 22 to the material of moveable or resonating members 16),certain material and structural parameters of moveable or resonatingmembers 16 (for example, the type of material and the height, width andlength of the moveable or resonating members 16), and/or the desiredtemperature dependent characteristics of the one or more moveable orresonating members of the microelectromechanical structure (for example,temperature coefficient of frequency (TCF) of such moveable orresonating members). Indeed, in one embodiment, the concentration ofimpurities in the material of the moveable or resonating members and/orgradients of such concentrations within the members are/is defined toprovide one or more predetermined temperature dependent characteristicsof the one or more moveable or resonating members (for example, TCF).

It should be noted that the amount of dopant driven into the structurefrom carrier layer 22 may be limited and/or controlled by the density ofthe dopant in carrier layer 22 and/or by the thickness of the carrierlayer 22, and/or by other properties of the material of carrier layer22. The amount of dopant driven into structure 16 may also be limitedand or controlled by the time and temperature of the drive-in step andby the material of structure 16. By selecting the limit or control ofdelivered dopant with one or more of these factors, or in other ways,may lead to more predictable manufacturing or product specification.With these techniques the doping density may be optimized.

In one embodiment, where the height of the moveable or resonating member16 is about 18 μm, dopant carrier layer 22 of POCl₃ may include athickness of about 90 nm. With reference to FIG. 3E, after transfer ofthe impurities or dopants from dopant carrier layer 22 to portions 16″of moveable or resonating members 16, in one embodiment, dopant carrierlayer 22 is removed, using, for example, conventional removaltechniques—for example, a wet etch process. Concurrently with theremoval of the dopant carrier layer, or after such removal, moveable orresonating member 16 may be released (vertically and/or horizontally)from substrate 14 via removal of insulating or sacrificial layer 14 b.(See, FIG. 3F).

In another embodiment, the height of moveable or resonator member 16 isabout 10 μm the POCl₃ carrier layer 22 of may include a thickness ofabout 50 nm. In some applications the thickness of carrier layer 22 maybe thinner or thicker, e.g. nanometers to microns.

Notably, microelectromechanical structure 12 (or selected portionsthereof—for example, portions 16″ of moveable or resonating members 16)may be sealed or encapsulated in a chamber—thereby protectingmicroelectromechanical structure 12 from the external environment and/orcontrolling the environment/conditions (for example, pressure) in whichmicroelectromechanical structure 12 operates/resides. Indeed, prior to,during and/or after sealing the chamber, the environment within thechamber may be defined, for example, via materials and processingtechniques that provide predetermined characteristics of the environmentin the chamber, for example, predetermined pressure and/or fluid (forexample, an inert gas or anti-stiction fluid). (See, for example, U.S.Pat. Nos. 6,930,367, 7,449,355 and 7,514,283). The environment withinthe chamber may be defined using any technique now known or laterdeveloped.

In one embodiment, microelectromechanical structure 12 may be sealed ina cavity via thin-film encapsulation process and structure. (See FIG.5A). Briefly, in one exemplary embodiment, after transfer of impuritiesor dopants from dopant carrier layer 22 to portions 16″ of moveable orresonating members 16 and removal of dopant carrier layer 22 using, forexample, a wet etch technique (see, for example, the processes of FIGS.3A-3E, and the text associated therewith—which, for the sake of brevity,will not be repeated here), a process of fabricating a thin-filmencapsulation structure may start with depositing or providingsacrificial layer 24 over microelectromechanical structure 12 (see FIG.5A). Thereafter, encapsulation layer 26 is provided, for example,formed, deposited and/or grown (see FIG. 5B). Vents (not illustrated inthis series of figures) may then be formed in encapsulation layer 26 andsacrificial layers 24 and 14 b are removed or etched around moveable orresonating members 16 of microelectromechanical structure 12 (forexample, using a vapor etch technique) thereby substantially or entirelyreleasing (vertically and horizontally) moveable or resonating members16. (See FIG. 5C). After releasing moveable or resonating members 16, inone embodiment, the vents may be closed and the cavity sealed viaanother deposition of a layer 28. (See FIG. 5D). A detailed discussionof an exemplary thin film encapsulation technique is described andillustrated in U.S. Pat. Nos. 6,936,491, 7,075,160, and 7,514,283.Notably, the microelectromechanical structure 12 may be sealed orencapsulated using any technique now known or later developed. In oneembodiment, the vents may be sealed via attaching a die, wafer or glasssubstrate (which may include other structures or integrated circuitrythereon) to encapsulation layer 26.

In another exemplary embodiment, the process of fabricating a thin-filmencapsulation structure may start with depositing or providingsacrificial layer 24 over microelectromechanical structure 12 prior toremoval of dopant carrier layer 22. (See FIG. 5F). Here, before orduring depositing or providing sacrificial layer 24 overmicroelectromechanical structure 12, the impurities or dopants of dopantcarrier layer 22 are transferred to portions 16″ of moveable orresonating members 16. After encapsulation layer 26 is provided, forexample, formed, deposited and/or grown (see FIG. 5F), vents (notillustrated in this series of figures) may then be formed therein andthe dopant carrier layer 22 may be concurrently removed with the releaseof the moveable or resonating member 16, via etching of sacrificiallayer 24, dopant carrier layer 22 and sacrificial layer 14 b. (See, FIG.5F). Here, dopant carrier layer 22 is removed substantially concurrentlywith the release of the moveable or resonating member 16, via etching ofsacrificial layers 24 and 14 b. (See, FIG. 5G).

In one embodiment, the microelectromechanical structure is unsealed ornot encapsulated and thereby directly exposed to the externalatmosphere/environment. Indeed, in those embodiments where themicroelectromechanical structure is unsealed or not encapsulated, it maybe advantageous to include a passivation layer on selected portions ofthe microelectromechanical structure. In one embodiment, the passivationlayer is a silicon oxide and/or a silicon nitride material which isdeposited or thermally grown. Such a passivation layer may improve longterm stability of the microelectromechanical structure wherein therelationship between temperature and resistance is more stable over thelife of the microelectromechanical structure.

In another embodiment, microelectromechanical structure 12 may besealed, for example, in a TO-8 “can” (or like structure) and/or in acavity via a wafer or glass substrate 30 bonded to the MEMS device dieor substrate. (See, FIG. 4B). In this regard, microelectromechanicalstructure 12 may be sealed in a chamber, for example, a hermeticallysealed metal container (see, for example, U.S. Pat. No. 6,307,815) orbonded to a semiconductor, metal or glass-like substrate having achamber to house, accommodate or cover microelectromechanical structure12 (see, for example, U.S. Pat. Nos. 6,146,917, 6,352,935, 6,477,901,and 6,507,082). In the context of the hermetically sealed metalcontainer, the substrate on, or in which, the resistive structure wouldreside may be disposed in and affixed to the metal container. Thehermetically sealed metal container typically serves as a primarypackage as well.

Notably, as intimated above, after or during sealing of the chamber, ananti-stiction fluid may be incorporated into the chamber. (See, forexample, U.S. Pat. Nos. 6,930,367 and 7,449,355). In this way, theanti-stiction characteristics of the moveable or resonating members ofthe microelectromechanical structure 12 may be enhanced.

In one embodiment, a manufacturing process in accordance with thepresent invention provides an impurity concentration gradient within thematerial of the moveable or resonating members of themicroelectromechanical structure. For example, in one embodiment, theimpurity concentration gradient is greater than one order of magnitudefrom an exposed portion of the moveable or resonating members to a moreinner or core portion thereof; in other embodiments the impurityconcentration gradient is greater than two and three orders ofmagnitude. In this regard, the impurity concentration gradient withinthe material of the moveable or resonating members is substantial.

With reference to FIGS. 6A-6D, in one embodiment, after formation of themoveable or resonating members of the microelectromechanical structure,dopant carrier layer 22 is deposited, formed, grown and/or provided onthe moveable or resonating members 16 (and, in this embodiment, onstationary members 18 a and 18 b as well—although such regions may bemasked if desired). Here again, dopant carrier layer 22 may includen-type or p-type impurities to be incorporated into the material ofmoveable or resonating members 16 to substantially increase the impuritydoping concentrations of the material of moveable or resonating members16 by at least one order of magnitude.

During and/or after depositing, forming, growing and/or providing thedopant carrier layer on moveable or resonating members 16, the impuritydopant in dopant carrier layer 22 is transferred to the semiconductormaterial (for example, monocrystalline silicon) of moveable orresonating members 16. In one embodiment, dopant in carrier layer 22 istransferred into the semiconductor material of moveable or resonatingmember via thermally annealing and/or heating. (See, for example, FIG.6B). In this embodiment, the concentration of impurities in portion 16″of moveable or resonating member is substantially greater than inportion 16′ of the moveable or resonating member. As such, in thisembodiment, the impurity concentration gradient within the material ofthe moveable or resonating member is substantial (greater than or equalto one or more of magnitude). For example, where the semiconductormaterial of the moveable or resonating members is formed frommonocrystalline silicon and includes an initial n-type impurityconcentration of about 10¹³ cm⁻³, in one embodiment, after thermalannealing or drive-in, the n-type impurity concentration of themonocrystalline silicon of portion 16″ of moveable or resonating memberis greater than 10¹⁹ cm⁻³ (and preferably, between 10¹⁹ cm⁻³ and 10²¹cm⁻³) and the n-type impurity concentration of the monocrystallinesilicon of portion 16′ is less than 10¹⁸ cm⁻³ (and, in anotherembodiment, is less than 10¹⁷ cm⁻³ or 10¹⁶ cm⁻³). In another exemplaryembodiment, where the semiconductor material of the moveable orresonating members is formed from monocrystalline silicon and includesan initial n-type impurity concentration of about 10¹⁹ cm⁻³, afterthermal annealing or drive-in, the n-type impurity concentration of themonocrystalline silicon of portion 16″ of moveable or resonating memberis greater than 10²⁰ cm⁻³ (and preferably, between 10²⁰ cm⁻³ and 10²¹cm⁻³) and the n-type impurity concentration of the monocrystallinesilicon of portion 16′ is less than 10²⁰ cm⁻³. (and preferably, between10¹⁹ cm⁻³ and 10²⁰ cm⁻³).

As in the previous embodiment, dopant carrier layer 22 may be removedbefore or concurrently with release of moveable or resonating members16. (See, FIGS. 6C and 6D). For the sake of brevity that discussion willnot be repeated in detail.

Notably, the impurity concentration gradient (for example, phosphorous,boron or arsenic) in the moveable or resonating members may bedetermined based on, among other things, the thickness of the dopantcarrier layer, the concentration of dopant in the carrier layer to beintroduced into the material of moveable or resonating members, thetransfer or driven processes and/or parameters (for example, the amountof time, atmosphere and/or temperature employed to drive in or transferthe dopant from the carrier layer to the material of moveable orresonating members), certain base material and structural parameters ofmoveable or resonating members (for example, the type of material andthe height, width and length of the moveable or resonating members),and/or the desired, selected and/or predetermined temperature dependentcharacteristics of the one or more moveable or resonating members of themicroelectromechanical structure (for example, temperature coefficientof frequency (TCF) of such moveable or resonating members).

In one embodiment, manufacturing processes according to another aspectof the present inventions provides different (i) concentrations ofdopant impurities, (ii) dopant impurities and/or (iii) impurityconcentration gradient in the materials of different moveable orresonating members of the microelectromechanical structure. For example,with reference to FIG. 7, in one embodiment, moveable or resonatingmember 16 a includes a first concentration of dopant impurities, firstdopant impurities and/or first impurity concentration gradient in thematerials thereof whereas moveable or resonating member 16 b includes asecond concentration of dopant impurities, second dopant impuritiesand/or second impurity concentration gradient in the materials thereof.In one embodiment, the processes (which may employ multiple maskingprocesses) of the microelectromechanical structure may include aplurality of different dopant carrier layers (each having, for example,different impurity dopant types and/or doping concentrations). Forexample, after formation of the moveable or resonating members of themicroelectromechanical structure, the different dopant carrier layersmay be sequentially deposited, formed, grown and/or provided onassociated selected portions of the moveable or resonating members usingmultiple masking steps (and, in this embodiment, on stationary membersas well—although such regions may be masked if desired).

For example, with reference to FIG. 7, in one embodiment,microelectromechanical structure 12 may be fabricated by providing,depositing, forming and/or growing a dopant carrier layer on moveable orresonating member 16 a while a mask layer protects moveable orresonating member 16 b. Thereafter, the mask layer protecting moveableor resonating member 16 b may be removed and a second dopant carrierlayer may be provided, deposited, formed and/or grown on moveable orresonating member 16 b. In this way, the moveable members may includedifferent (i) concentrations of dopant impurities, (ii) dopantimpurities and/or (iii) impurity concentration gradient in the materialsof different moveable or resonating members of themicroelectromechanical structure.

Notably, a second masking layer may or may not be provided on and/orover the dopant carrier layer on moveable or resonating member 16 awhile the second dopant layer is provided, deposited, formed and/orgrown on moveable or resonating member 16 b. Moreover, the impuritydopants of the first dopant carrier layer may be transferred to moveableor resonating member 16 a before, during and/or after impurity dopantsof the second dopant carrier layer are transferred to moveable orresonating member 16 b.

Indeed, in one embodiment, the impurity concentration(s) in the materialof the moveable or resonating members and/or gradients of suchconcentrations within the members are/is defined to providepredetermined net temperature dependent characteristics of the one ormore moveable or resonating members (for example, TCF) so that over agiven manufacturing tolerance and operating temperature range, the oneor more predetermined temperature dependent characteristics are within apredetermined range. Here, the microelectromechanical structure may bemanufactured (using, for example, the techniques described herein) toprovide a (1) first moveable or resonating member having a firstimpurity concentration and/or a first impurity gradient and (2) a secondmoveable or resonating member includes a second impurity concentrationhaving a second impurity gradient. The impurity concentrations andimpurity gradients may be selected to provide a net temperaturedependent characteristics of the one or more moveable or resonatingmembers (for example, TCF) so that over a given manufacturing toleranceand operating temperature range. For example, with reference to FIG. 8,the materials of one or more of the moveable or resonating members mayinclude impurity concentration which provides a TCF associated with “1”and the materials of one or more other/different moveable or resonatingmembers of the microelectromechanical structure may include impurityconcentration which provides a TCF associated with “2”. In this way,where the doping impurity concentrations changes due to, for example,manufacturing tolerances of the various processes, the overall or nettemperature dependent characteristics of the one or more moveable orresonating members (for example, TCF) remain relatively constant and/orwithin a predetermined range. Here, any changes in impurityconcentration(s) in moveable or resonating members associated with “1”,due to, for example, manufacturing controllability and/or tolerances,may offset related changes in impurity concentration(s) in moveable orresonating members associated with “2”.

Notably, although the impurity concentration(s) and/or gradients of suchconcentrations may not provide a maximum or preferred reduction in thesensitivity of the temperature dependent characteristic of the moveableor resonating structure, such impurity concentration(s) and/or gradientsof such concentrations provide a sensitivity of the temperaturedependent characteristic (for example, thermally-induced changes to theYoung's modulus which tends to cause considerable drift or change in thefrequency of the output of a microelectromechanical resonator) overmanufacturing variations or tolerances in processes which is within apredetermined range or limits.

In another embodiment, the microelectromechanical structure is designedand manufactured such that a first moveable or resonating memberincludes a first impurity concentration having a first impurity gradientand a second moveable or resonating member includes a second impurityconcentration having a second impurity gradient. In this way, the firstand second moveable or resonating members include one or more differenttemperature dependent characteristics. For example, with reference toFIG. 9, in one embodiment, moveable or resonating member 16 a includesan impurity concentration having a first impurity gradient which isdifferent from second moveable or resonating member 16 b includes asecond impurity concentration having a second impurity gradient. Withreference to FIGS. 10A-10D, in one embodiment, microelectromechanicalstructure 12 of FIG. 9 may be manufactured using techniques similar tothose described above with respect to FIG. 6. That is, after formationof the moveable or resonating members 16 a and 16 b, dopant carrierlayer 22 is deposited, formed, grown and/or provided thereon (and, inthis embodiment, on stationary members 18 a and 18 b as well—althoughsuch regions may be masked if desired). As noted herein, dopant carrierlayer 22 may include n-type or p-type impurities to be incorporated intothe material of moveable or resonating members 16 a and 16 b to increasethe impurity doping concentrations of the material thereof.

During and/or after depositing, forming, growing and/or providing dopantcarrier layer 22 on moveable or resonating members 16 a and 16 b, theimpurity dopant in dopant carrier layer 22 is transferred to thesemiconductor material (for example, monocrystalline silicon) ofmoveable or resonating members. (See, for example, FIG. 10B). In oneembodiment, impurities in carrier layer 22 are transferred into thesemiconductor material of moveable or resonating member via thermallyannealing and/or heating. In this embodiment, the concentrations ofimpurities in portion 16 a″ and 16 b″ of moveable or resonating member16 a and 16 b, respectively, are substantially greater than in portion16 b′ of moveable or resonating member. Moreover, the impurityconcentration within the material of portions 16 a″ of moveable orresonating member 16 a may be greater than or equal to impurityconcentration within the material of portions 16 b″ of moveable orresonating member 16 b. For example, where the semiconductor material ofthe moveable or resonating members is formed from monocrystallinesilicon and includes an initial n-type impurity concentration of about10¹³ cm⁻³, in one embodiment, after transfer of the impurity dopantsfrom carrier layer 22, the n-type impurity concentration of themonocrystalline silicon of portions 16 a″ and 16 b″ of moveable orresonating member is greater than 10¹⁹ cm⁻³ (and preferably, between10¹⁹ cm⁻³ and 10²¹ cm⁻³) and the n-type impurity concentration of themonocrystalline silicon of portion 16 b′ is less than 10¹⁸ cm⁻³ (and, inanother embodiment, is less than 10¹⁷ cm⁻³ or 10¹⁶ cm⁻³).

Notably, dopant carrier layer 22 may be removed before or concurrentlywith release of moveable or resonating members 16. (See, FIGS. 6C and6D). For the sake of brevity that discussion will not be repeated indetail.

In another embodiment, the dopant carrier layer may be deposited,formed, grown and/or provided on the moveable or resonating membersafter such moveable or resonating members are released. For example,with reference to FIGS. 11A-11D, in one embodiment, after defining orforming one or more of the moveable or resonating members (and, in thisexemplary embodiment, stationary members 18), and releasing moveable orresonating members 16, an exemplary method of the present inventions maydeposit, form, grow and/or provide dopant carrier layer 22 on moveableor resonating members 16. (See, FIGS. 11A and 11B). The dopant carrierlayer 22 includes one or more impurity dopants and/or types (n-type orp-type impurities) which are to be incorporated into moveable orresonating members 16. In one exemplary embodiment, dopant carrier layer22 may be phosphorus oxychloride (POCl₃) which, as discussed herein, isemployed as a source of phosphorus (an n-type impurity) to increase theconcentration of dopant or impurities in the material of moveable orresonating members 16.

With reference to FIG. 11C, during and/or after providing, depositing,forming and/or growing dopant carrier layer 22 on moveable or resonatingmembers 16, the dopants in dopant carrier layer 22 are transferred to ordriven into moveable or resonating members 16 (which after transfer ordrive-in are identified as 16″ to reflect or indicate an increase inconcentration of dopant within the material of portions 16′ of members16). In one embodiment, thermally annealing or heating is employed toinduce the transfer of the impurities into moveable or resonatingmembers 16. For example, where dopant carrier layer 22 is POCl₃ and thematerial of moveable or resonating members 16 is silicon, thephosphorous in the POCl₃ dopant carrier layer 22 is transferred fromlayer 22 to the material of moveable or resonating members 16 therebyincreasing the concentration of n-type dopants by one or more orders ofmagnitude of the concentration of n-type dopants in the material ofmoveable or resonating members 16. In this embodiment, providing dopantcarrier layer 22 over a greater surface of moveable or resonatingmembers 16 facilitates an increase in dopants and uniformity thereofwithin moveable or resonating members 16. In this way, the amount oftime to provide a predetermined the concentration of impurities in thematerial of the moveable or resonating members and/or gradients of suchconcentrations within the members (which provides one or morepredetermined temperature dependent characteristics of the one or moremoveable or resonating members (for example, TCF)) may be reduced.

With reference to FIG. 11D, after transfer of the impurities or dopantsfrom dopant carrier layer 22 to moveable or resonating members 16, inone embodiment, dopant carrier layer 22 may be removed, using, forexample, conventional removal techniques—for example, a wet etchprocess.

Notably, although many of the exemplary embodiments described andillustrate providing, depositing, forming and/or growing dopant carrierlayer 22 on moveable or resonating members 16 before releasing suchmembers from the substrate, such exemplary embodiments are applicable toand may employ a process of dopant carrier layer 22 being provided,deposited, formed and/or grown on the released moveable or resonatingmembers 16. For the sake of brevity, such exemplary embodiments having adopant carrier layer 22 being provided, deposited, formed and/or grownon the released moveable or resonating members 16 will not be repeated.

The MEMS device of the present inventions may be a discrete device. Forexample, MEMS device 10, including a microelectromechanical structuremanufactured in accordance with any of the techniques described and/orillustrated herein, may be formed in and/or on die 34 (for example, anyof the embodiments described and/or illustrated herein, including anycombinations and permutations thereof). (See, for example, FIG. 12A).The MEMS device 10 may include one or more microelectromechanicalstructures 12.

In another embodiment, the MEMS device of the present inventions may befabricated on a die having one or more other devices, structures and/orcircuits. For example, in one embodiment, MEMS device 10 may bemanufactured on die 34 including one or more micromachined thermistorstructures (like that described and illustrated in ProvisionalApplication Ser. No. 61/533,148, Inventor: Arft et al., filed Sep. 9,2011, the contents of which are incorporated herein by reference). (See,for example, FIGS. 12B and 12D).

The MEMS device 10 may be integrated in, on and/or above a substrate 14which includes circuitry. (See, for example, FIGS. 12C and 12D). Forexample, the MEMS device 10 may be a MEMS resonator and the integratedcircuitry may be clock generation circuitry including one or more phaselocked loops (PLLs), delay locked loops (DLLs), digital/frequencysynthesizer (for example, a direct digital synthesizer (“DDS”),frequency synthesizer, fractional synthesizer and/or numericallycontrolled oscillator) and/or frequency locked loops (FLLs).

In another embodiment, MEMS device includes one or more temperaturesensing active devices, for example, temperature sensing diodes ortransistors. For example, with reference to FIGS. 12E and 12F, MEMSdevice 10 may be integrated in, on and/or above a substrate 14 whichincludes a temperature sensing active device 36. Such temperaturesensing active device 36 may be one or more temperature sensing diodes,which is/are fabricated in and/or from the heavily doped semiconductormaterial in periphery or field areas 40 of MEMS device 10. (See, forexample, FIG. 13). Here, in one embodiment, the opposite regions may befabricated by counter-doping the heavily doped material or using a maskwhile doping material of the moveable or resonating member andthereafter doping the masked/undoped region with a dopant providing atype of material that is opposite the heavily doped material. Notably,all techniques for fabricating the one or more temperature sensingactive devices are intended to fall within the scope of the presentinventions.

Thus, the MEMS structures of the present inventions may be a discretedevice or integrated on a substrate or die with one or more otherstructures (for example, one or more MEMS structures). In additionthereto, or in lieu thereof, the MEMS resonator structure may beintegrated with circuitry as an integrated circuit type device. In thisregard, the MEMS resonator structure of the present inventions (whichmay have one or more MEMS resonator structure) may be integrated on adie including integrated circuitry and/or one or more other MEMSresonator structure(s).

There are many inventions described and illustrated herein. Whilecertain embodiments, features, attributes and advantages of theinventions have been described and illustrated, it should be understoodthat many others, as well as different and/or similar embodiments,features, attributes and advantages of the present inventions, areapparent from the description and illustrations. As such, theembodiments, features, attributes and advantages of the inventionsdescribed and illustrated herein are not exhaustive and it should beunderstood that such other, similar, as well as different, embodiments,features, attributes and advantages of the present inventions are withinthe scope of the present inventions.

Indeed, the present inventions are neither limited to any single aspectnor embodiment thereof, nor to any combinations and/or permutations ofsuch aspects and/or embodiments. Moreover, each of the aspects of thepresent inventions, and/or embodiments thereof, may be employed alone orin combination with one or more of the other aspects of the presentinventions and/or embodiments thereof.

For example, the doping processes may include counter-doping whichincludes (i) a first dopant type at first doping level and (ii) a seconddopant type (which is opposite the first dopant type) at a second dopinglevel. In the context of counter-doping, the dominant dopant type andthe net doping concentration of the MEMS resonator structure depend on,among other things, the dopant types and the doping levels of suchimpurities. Indeed, in another embodiment, the doping processes of theMEMS resonator structure (which may employ multiple masking processes)may provide a first region of the MEMS resonator structure having firstdopant type(s) and/or first doping level(s), and a second region of theMEMS resonator structure having second dopant type(s) and/or seconddoping level(s).

Further, the present inventions may employ any dopant and/or any“carrier” of the dopant to provide the highly doped semiconductor (forexample, monocrystalline silicon). In one embodiment, for example, thedopant provides excess n-type carriers in the moveable or resonatingmembers of the microelectromechanical structure (for example, one ormore elements of Group 15 of the periodic table—such as phosphorous,arsenic and/or antimony). In another embodiment the dopant providesexcess p-type carriers in the moveable or resonating members (forexample, one or more elements of Group 13 of the periodic table—such asboron, gallium and/or indium). Further, in one embodiment, the “carrier”is a doped silicon glass (for example, phosphorous or boron dopedsilicon dioxide) and/or a doped silicon (for example, a germanium,phosphorous or boron doped silicon). Any carrier, now known or laterdeveloped, may be employed in connection with these inventions.

Moreover, the manufacturing process described herein is generally notlimited to a particular order. For example, as described above, thedopant carrier layer may be provided, deposited, formed and/or grownbefore, during and/or after release of the moveable or resonatingmembers. Moreover, the dopant carrier layer may be removed before,concurrently with, or after the sacrificial layer of the substrate.(See, for example, FIGS. 14A and 14B wherein dopant carrier layer 22 isremoved substantially currently with (and using the same materials(etchants) and/or techniques of removal of sacrificial layer 14 b andrelease of moveable or resonating members 16).

Indeed, as mentioned above, the dopant carrier layer may be removedbefore the dopant of the dopant carrier layer is driven into thesemiconductor material of the moveable or resonating members viathermally annealing and/or heating. For example, with reference to FIGS.15A and 15B, in another exemplary embodiment, after depositing, growing,forming and/or providing dopant carrier layer 22 on moveable orresonating members 16—but before transferring/driving or substantiallytransferring/driving dopant impurities from dopant carrier layer 22 intothe semiconductor material of moveable or resonating members 16, dopantcarrier layer 22 is removed thereby leaving dopant impurities 38substantially at the surface of the semiconductor material of moveableor resonating members 16 (see FIG. 15B). During removal of dopantcarrier layer 22, or thereafter, the dopant impurities at the surfaceare driven into other portions of the semiconductor material of moveableor resonating members 16 via, for example, thermally annealing and/orheating (see FIG. 15C) and thereby substantially increasing the dopingconcentrations of a selected or significant portion of the semiconductormaterial of the moveable or resonating members (which after transfer ordrive-in portions are identified as 16″ to reflect or indicate anincrease in concentration of dopant within such portion of the materialof members 16).

As such, in this embodiment, dopant impurities 38 from dopant carrierlayer 22 are transferred to the surface of the semiconductor material ofmoveable or resonating members 16 during deposition, growth and/orformation of dopant carrier layer 22—and, after (or during) removal ofdopant carrier layer 22, dopant impurities 38 which are substantially atthe surface of the semiconductor material of moveable or resonatingmembers 16 are transferred/driven deeper into the semiconductor materialof the moveable or resonating members (for example, via thermallyannealing and/or heating) to thereby reduce and/or control thesensitivity of the temperature dependent characteristics of the one ormore moveable or resonating members of the microelectromechanicalstructure. During or after dopant impurities 38 are driven deeper intothe semiconductor material of moveable or resonating members 16,moveable or resonating members 16 may be released via removal ofportions of sacrificial layer 14 b. (See FIG. 15D).

Indeed, the technique of removing the dopant carrier layer prior totransferring/driving or substantially transferring/driving dopantimpurities from the dopant carrier layer into the semiconductor materialof the moveable or resonating members may provide a resulting structurehaving a lower concentration of dopant impurities at the surface (aftertransfer or drive-in) relative to those resulting structuresmanufactured using techniques that remove or etch the dopant carrierlayer after transfer or drive-in.

Notably, the doping techniques illustrated in FIGS. 15A-15D may employany of dopant distribution techniques described and/or illustratedherein. For example, one or more first regions or structures of a MEMSdevice may be doped using the techniques described in connection withFIGS. 15A-15D to provide a first impurity concentration level of regionsof the moveable or resonating members which are different from theimpurity concentration level of other regions of such members. (See, forexample, FIGS. 10D, 11D and 14D). That is, one or more regions/portionsof the structure may be doped to a first impurity concentration levelwhile other regions/portions of the structure are not doped and/or aredoped differently (for example, a different impurity, impurity level,different gradient and/or impurity type). For the sake of brevity, suchdiscussions will not be repeated.

Further, as mentioned above, manufacturing processes of the presentinventions may provide different (i) concentrations of dopantimpurities, (ii) dopant impurities and/or (iii) impurity concentrationgradient in the materials of different moveable or resonating members ofthe microelectromechanical structure. (See, for example, FIG. 7).

As mentioned above, MEMS device 10 may include one or more MEMSstructures and may be any shape or device now known or later developed.For example, the MEMS device may include one or more structures toprovide a gyroscope, resonator and/or accelerometer, made in accordancewith well-known fabrication techniques, such as lithographic and otherprecision fabrication techniques, which form mechanical components to ascale that is generally comparable to microelectronics.

Moreover, the MEMS structure may include slots in one or more of themoveable or resonating members to facilitate, for example, more thoroughimpurity concentration in the material thereof and/or more completerelease of the structure. For example, with reference to FIGS. 16 and17A-17E, in one embodiment, the moveable or resonating member includes aplurality of slots 40 formed therein. In this architecture, slots 40allow dopant carrier layer 22 to form, deposit and/or grow on a largersurface area of moveable or resonating members 16. (See, for example,FIG. 17B). As such, after the dopant in the carrier layer is transferredinto the semiconductor material of moveable or resonating members 16,for example, via thermally annealing and/or heating, the concentrationof impurities in the material of “center” portion of the moveable orresonating members 16 includes a substantial increase of the dopingconcentrations and thereby provide for reduced and/or controlledsensitivity of the temperature dependent characteristics of moveable orresonating members 16 of microelectromechanical structure 12. (See,FIGS. 17C-16E; and compare FIGS. 17C-17E to FIGS. 6C, 6D, 11C and 11D).In this way, the “center portion” of the semiconductor material ofmoveable or resonating members 16 formed from monocrystalline siliconmay include an n-type impurity concentration, after fabrication, ofgreater than 10¹⁵ cm⁻³ (and preferably, between 10¹⁵ cm⁻³ and 10²¹cm⁻³), and more preferably, greater than 10¹⁹ cm⁻³ (and preferably,between 10¹⁹ cm⁻³ and 10²¹ cm⁻³). In another exemplary embodiment, wherethe semiconductor material of the moveable or resonating members isformed from monocrystalline silicon and includes an initial n-typeimpurity concentration of about 10¹⁹ cm⁻³, the “center portion” ofsemiconductor material of moveable or resonating members 16 formed frommonocrystalline silicon may include an n-type impurity concentration,after fabrication, of greater than 10²⁰ cm⁻³ (and preferably, between10²⁰ cm⁻³ and 10²¹ cm⁻³). Indeed, these embodiments may be employ toreduce and/or control the gradient of the impurity concentration withinthe material of the moveable or resonating members—particularly, inthose embodiment where the moveable or resonating members includechallenging dimensions.

As noted above, the microelectromechanical structure may be designed andmanufactured such that portions of the moveable or resonating membershave different impurity concentrations (having different impurityconcentration gradients). In one embodiment, the microelectromechanicalstructure includes a moveable or resonating member having a plurality ofwidths such that a first portion of the moveable or resonating memberincludes a first impurity concentration (and, in one embodiment, a firstimpurity gradient) and a second portion of the moveable or resonatingmember includes a second impurity concentration (and, in one embodiment,a second impurity gradient). In this way, the first and second portionsof the moveable or resonating member include one or more differenttemperature dependent characteristics. (See, for example, FIG. 8 and thediscussion associated therewith). For example, with reference to FIGS.18, 19A and 19B, in one embodiment, a first portion 16 a of moveable orresonating member 16 includes an impurity concentration (and/or having afirst impurity gradient) which is different from a second portion 16 bof moveable or resonating member 16 which includes a second impurityconcentration (and/or having a second impurity gradient).

Notably, the moveable or resonating member of the microelectromechanicalstructure having a plurality of widths may be fabricated using any ofthe techniques described and/or illustrated herein including, forexample, the processes illustrated in FIGS. 3A-3F. For the sake ofbrevity, such discussion will not be repeated. Regardless of the actualprocesses, the dopant from the dopant carrier layer, after transfer ordrive-in, substantially increases the impurity concentrations ofportions of the semiconductor material of the moveable or resonatingmembers wherein portions of the moveable or resonating member includedifferent impurity concentrations (and/or different impurity gradient)which after transfer or drive-in portions are identified as 16 a″ or 16b″ to reflect or indicate an increase in concentration of dopant withinsuch portion of the material of members 16). (See, FIGS. 19A and 19B).

Although the embodiments described and illustrated herein adjust theimpurity concentrations of semiconductor material of the moveable orresonating members by selectively increasing the impurity concentration,in another aspect of the present inventions, the impurity concentrationof the moveable or resonating members of the microelectromechanicalstructure may be adjusted by removing impurities therefrom. That is, inlieu of increasing the impurity concentrations of semiconductor materialof the moveable or resonating members, the layer deposited, formed,grown and/or provided on the moveable or resonating members adjusts theimpurity concentrations in semiconductor material of the moveable orresonating member by removing n-type or p-type impurities. Thus, in theembodiments of this aspect of the inventions, an impurity removal layeris deposited, formed, grown and/or provided on the moveable orresonating members and, in one embodiment, in response to an activationprocess (for example, thermal annealing), n-type or p-type impuritiestransfer from the moveable or resonating members to the impurity removallayer.

For example, with reference to FIGS. 20A and 20B, the manufacture ofmicroelectromechanical structure 12, in one exemplary embodiment of thisaspect of the inventions, includes forming or fabricating moveable orresonating member 16″ from a semiconductor on insulator (SOI) substrate14 having a silicon layer 14 c disposed on an insulating or sacrificiallayer 14 b, which is disposed on a “handle” layer 14 a (for example,silicon). In this exemplary embodiment, silicon layer 14 c may bemonocrystalline silicon having a first concentration of p-typeimpurities (for example, an initial or background p-type impurityconcentration of about 10¹⁹ cm⁻³). The moveable or resonating member 16″may be formed or fabricated in substrate 14 c using conventionallithographic and etching techniques (see channels 20 which defines themoveable or resonating member 16″). Indeed, any technique, now known orlater developed, may be employed to form or fabricate moveable orresonating member 16″.

After defining or forming one or more of the moveable or resonatingmembers, with reference to FIG. 20C, the method of this aspect of thepresent inventions deposits, forms, grows and/or provides impurityremoval layer 42 on moveable or resonating members 16″. The impurityremoval layer 42 includes a material that has a higher attraction(relative to the material of moveable or resonating members 16″) for oneor more dopants and/or dopant types (n-type or p-type impurities) whichreside in moveable or resonating members 16″ and/or the segregationcoefficient of the materials at the interface of layer 42 and resonatingmember 16″ is sufficient to remove dopant near or at the surface of thematerial of member 16″. In this exemplary embodiment, impurity removallayer 42 may be an undoped silicon glass (for example, silicon dioxide)which is employed to remove or absorb a p-type impurity (for example,boron) and thereby reduce the concentration of dopant or impurities inthe material of moveable or resonating members 16.

With reference to FIG. 20D, during and/or after providing, depositing,forming and/or growing impurity removal layer 42 on moveable orresonating members 16″, the impurity dopants in the material of moveableor resonating members 16″ is transferred to or driven into impurityremoval layer 42 (which after transfer or drive-in portions areidentified as 16 to reflect or indicate an increase in concentration ofimpurity dopant within such portion of the material of members 16′). Inone embodiment, thermally annealing or heating is employed to induce thetransfer of the n-type or p-type impurities from the material ofmoveable or resonating members 16 (for example, at or near the surfacethereof) to impurity removal layer 42.

With reference to FIG. 20E, after absorption of the impurities ordopants by impurity removal layer 42 from 16″ of moveable or resonatingmembers 16, in one embodiment, impurity removal layer 42 is removed,using, for example, conventional removal techniques—for example, a wetetch process. Concurrently with the removal of the dopant carrier layer,or after such removal, moveable or resonating member 16 may be released(vertically and/or horizontally) from substrate 14 via removal ofinsulating or sacrificial layer 14 b. (See, FIG. 20F).

The various embodiments described above with respect to adjusting theimpurity concentration of the moveable or resonating members of themicroelectromechanical structure by increasing such concentration arefully applicable to adjusting the impurity concentration by removingimpurities from the material of the moveable or resonating members. Forexample, impurity removal process(es) may be “patterned” so that one ormore first regions or structures of a MEMS device include a firstimpurity concentration level and one or more other regions or structuresof the device are substantially maintained at background doping leveland/or at an impurity concentration level that is/are different from thefirst region(s) or structure(s). Here, one or more regions/portions of astructure may include a first impurity concentration level while otherregions/portions of the structure are not doped and/or are dopeddifferently (for example, a different impurity, impurity level,different gradient and/or impurity type) so that one structure of thedevice is fabricated from the highly doped semiconductor and anotherstructure is not fabricated from substantially the same highly dopedsemiconductor (for example, such other structure may be fabricated frommaterial having a impurity concentration that is substantially at thebackground doping level. For the sake of brevity such discussions willnot be repeated.

When the carrier layer 22 contacts the sides and top of the structure 16and the dopant is driven in from the carrier layer 22 then there may bea vertical asymmetry in the final dopant profile in structure 16. Insome cases this may not be desirable. This asymmetry may be reduced asshown in FIG. 11A-11D by releasing structure 16 prior to depositingcarrier layer 22 and then driving dopant in from the carrier layer 16from the sides and the top and the bottom. In this way structure 16 canbe doped from the top and bottom symmetrically. An additional way toachieve a vertically symmetrical dopant profile is to remove the carrierlayer 16 after deposition but prior to drive-in, as shown in FIGS.21A-21E, where FIG. 21C shows the lateral surfaces of carrier layer 22removed. This form or removal is well known to those skilled in the artof wafer processing as a common result of plasma etching.

In yet another embodiment, the top surface of member 16 may be protectedwith a mask layer 50 from contact with carrier layer 22 as shown inFIGS. 22A-22D. The mask should be chosen to properly isolate the dopant,this can be done for instance with an oxide deposited prior to theetching step that forms structure 16. This is often referred to as ahard mask for that etch. Hard masks may be used to improve the etchingproperties and may be removed prior to further processing, but in thisexemplary embodiment the hard mask may be left on, as shown in FIG. 22A.After the drive in FIG. 22C the dopant has not penetrated the hard mask.

By removing or masking the carrier layer 22, the member 16 may be builtwith doping only or primarily from the sides and not the top or bottom.In these ways the dopant symmetry both laterally and vertically inmember 16 may be more uniform.

Notably, although, at times, the present inventions have been describedand/or illustrated in relation to or in the context of asemiconductor-on-insulator (SOI) substrate. For example, thesemiconductor layer of the SOI substrate may be materials in column IVof the periodic table, for example, silicon, germanium, carbon; alsocombinations of these, for example, silicon germanium, or siliconcarbide; also of III-V compounds, for example, gallium phosphide,aluminum gallium phosphide, or other III-V combinations; alsocombinations of Ill, IV, V, or VI materials, for example, siliconnitride, silicon oxide, aluminum carbide, or aluminum oxide; alsometallic silicides, germanides, and carbides, for example, nickelsilicide, cobalt silicide, tungsten carbide, or platinum germaniumsilicide; also doped variations including phosphorus, arsenic, antimony,boron, or aluminum doped silicon or germanium, carbon, or combinationslike silicon-germanium; also these materials with various crystalstructures, including single/mono crystalline, polycrystalline,nanocrystalline, or amorphous; also with combinations of crystalstructures, for instance with regions of single crystalline andpolycrystalline structure (whether doped or undoped). Notably, themechanical and/or thermistor structures may be comprised of the samematerials as described above with respect to the first semiconductorlayer.

Other substrates are also suitable—including, an insulating material(for example, a ceramic material, a glass material, a silicon oxidematerial and a silicon nitride material). The substrate may be asemiconductor material of a standard wafer (for example, amonocrystalline or polycrystalline silicon wafer) having an insulator orsacrificial layer deposited thereon. Moreover, the substrate may be ametal material. All substrates now known or later developed are intendedto fall within the scope of the present inventions.

Moreover, the present inventions may include deposition, formationand/or growth of a silicon (doped or undoped) on the impurity adjustedmoveable or resonating members of the microelectromechanical structure.In this embodiment, after adjusting the impurity concentration of thematerial of the moveable or resonating members of themicroelectromechanical structure (according to any of the embodimentsdescribed and/or illustrated herein), the technique may includedepositing, forming, growing and/or providing silicon (doped or undoped)on the surface of the moveable or resonating members to, for example,adjust the temperature coefficient of frequency (TCF) of moveable orresonating members as well as adjust the gap length between themicroelectromechanical structure and the drive/sense electrodes.

It should be further noted that various structures (for example, thestructures of the MEMS device), circuits and/or circuitry may bedescribed using computer aided design tools and expressed (orrepresented), as data and/or instructions embodied in variouscomputer-readable media, in terms of their behavioral, registertransfer, logic component, transistor, layout geometries, and/or othercharacteristics. Formats of files and other objects in which suchstructure and/or circuit expressions may be implemented include, but arenot limited to, formats supporting behavioral languages such as C,Verilog, and HLDL, formats supporting register level descriptionlanguages like RTL, and formats supporting geometry descriptionlanguages such as GDSII, GDSIII, GDSIV, CIF, MEBES and any othersuitable formats and languages. Computer-readable media in which suchformatted data and/or instructions may be embodied include, but are notlimited to, non-volatile storage media in various forms (e.g., optical,magnetic or semiconductor storage media) and carrier waves that may beused to transfer such formatted data and/or instructions throughwireless, optical, or wired signaling media or any combination thereof.Examples of transfers of such formatted data and/or instructions bycarrier waves include, but are not limited to, transfers (uploads,downloads, e-mail, etc.) over the Internet and/or other computernetworks via one or more data transfer protocols (e.g., HTTP, FTP, SMTP,etc.).

Indeed, when received within a computer system via one or morecomputer-readable media, such data and/or instruction-based expressionsof the above described structures, circuits and/or circuitry may beprocessed by a processing entity (e.g., one or more processors) withinthe computer system in conjunction with execution of one or more othercomputer programs including, without limitation, net-list generationprograms, place and route programs and the like, to generate arepresentation or image of a physical manifestation of such structures,circuits and/or circuitry. Such representation or image may thereafterbe used in device fabrication, for example, by enabling generation ofone or more masks that are used to form various components of thecircuits in a device fabrication process.

Moreover, the various structures (for example, the structures of theMEMS device), circuits and/or circuitry disclosed herein may berepresented via simulations using computer aided design and/or testingtools. The simulation of the various structures and/or characteristicsor operations thereof may be implemented by a computer system whereincharacteristics and operations of such structures and/or circuitry, andtechniques implemented thereby, are imitated, replicated and/orpredicted via a computer system. The present inventions are alsodirected to such simulations of the inventive structures and circuitry,and/or techniques implemented thereby, and, as such, are intended tofall within the scope of the present inventions. The computer-readablemedia corresponding to such simulations and/or testing tools are alsointended to fall within the scope of the present inventions.

The term “depositing” and other forms (i.e., deposit, deposition anddeposited), in the claims, means, among other things, depositing,creating, forming and/or growing a layer of material. In addition, theterms “first,” “second,” and the like, herein do not denote any order,quantity, or importance, but rather are used to distinguish one elementfrom another. Moreover, the terms “a” and “an” herein do not denote alimitation of quantity, but rather denote the presence of at least oneof the referenced item.

What is claimed is:
 1. A method of manufacturing a micromachinedresonator having a moveable member in or on a substrate comprising:forming the moveable member of the micromachined resonator from amaterial having a first concentration of dopants of a first impuritytype; depositing a dopant carrier layer on or over at least a portion ofthe moveable member, wherein the dopant carrier layer includes one ormore dopants of the first impurity type; transferring at least a portionof the one or more dopants from the dopant carrier layer to the moveablemember, wherein, in response, the concentration of dopants of the firstimpurity type in the moveable member increases by at least one order ofmagnitude; removing the dopant carrier layer; and providing anencapsulation structure over the moveable member of the micromachinedresonator.
 2. The method of manufacturing of claim 1 wherein the one ormore dopants include phosphorous, arsenic, antimony, boron, galliumand/or indium.
 3. The method of manufacturing of claim 1 wherein, aftertransferring at least the one or more dopants from the dopant carrierlayer to the moveable member, the concentration of dopants of the firstimpurity type in the moveable member is at least three orders ofmagnitude greater than the first concentration of dopants.
 4. The methodof manufacturing of claim 1 further including releasing the moveablemember of the micromachined resonator from the substrate during or afterremoving the dopant carrier layer.
 5. The method of manufacturing ofclaim 1 wherein the material of the moveable member of the micromachinedresonator is substantially monocrystalline silicon.
 6. The method ofmanufacturing of claim 1 wherein transferring at least the portion ofthe one or more dopants from the dopant carrier layer to the moveablemember further includes heating the moveable member and the dopantcarrier layer after depositing a dopant carrier layer on the moveablemember and before removing the dopant carrier layer.
 7. The method ofmanufacturing of claim 6 wherein after transferring at least the portionof the one or more dopants from the dopant carrier layer to the moveablemember dopant, the first material of the moveable member includes aconcentration of the first impurity type of greater than 10¹⁹ cm⁻³. 8.The method of manufacturing of claim 7 wherein the concentration of thefirst impurity type in the material of the moveable member issubstantially uniform.
 9. The method of manufacturing of claim 7 whereinthe material of the moveable member of the micromachined resonator issubstantially monocrystalline silicon.
 10. A method of manufacturing amicromachined resonator having a moveable member in or on a substratecomprising: forming the moveable member of the micromachined resonatorfrom a material having a first concentration of dopants of a firstimpurity type, wherein the moveable member includes a plurality ofexposed surfaces; depositing a dopant carrier layer on or over at leastat least one of the plurality of exposed surfaces of the moveablemember, wherein the dopant carrier layer includes one or more dopants ofthe first impurity type; transferring at least a portion of the one ormore dopants from the dopant carrier layer to the moveable member viathe at least one of the plurality of exposed surfaces of the moveablemember, wherein, in response, the concentration of dopants of the firstimpurity type in the moveable member increases by at least one order ofmagnitude; removing substantially all of the dopant carrier layer; andproviding a cover over the moveable member of the micromachinedresonator.
 11. The method of manufacturing of claim 10 wherein, aftertransferring at least the one or more dopants from the dopant carrierlayer to the moveable member, the concentration of dopants of the firstimpurity type in at least a portion of the material of the moveablemember is at least three orders of magnitude greater than the firstconcentration of dopants and the concentration of the first impuritytype in the material of the moveable member is non-uniform.
 12. Themethod of manufacturing of claim 10 wherein the one or more dopantsinclude phosphorous, arsenic, antimony, boron, gallium and/or indium.13. The method of manufacturing of claim 10 further including releasingthe moveable member of the micromachined resonator from the substrateduring or after removing substantially all of the dopant carrier layer.14. The method of manufacturing of claim 10 wherein the material of themoveable member of the micromachined resonator is substantiallymonocrystalline silicon.
 15. The method of manufacturing of claim 10wherein transferring at least a portion of the one or more dopants fromthe dopant carrier layer to the moveable member via the at least one ofthe plurality of exposed surfaces of the moveable member furtherincludes heating the moveable member and the dopant carrier layer afterdepositing the dopant carrier layer and before removing the dopantcarrier layer.
 16. A method of manufacturing a micromachined resonatorhaving a moveable member in or on a substrate comprising: forming themoveable member of the micromachined resonator from a material having afirst concentration of dopants of a first impurity type, wherein themoveable member includes a plurality of exposed surfaces; depositing adopant carrier layer on the plurality of exposed surfaces of themoveable member, wherein the dopant carrier layer includes one or moredopants of the first impurity type; transferring at least a portion ofthe one or more dopants from the dopant carrier layer to the moveablemember, wherein, in response, the concentration of dopants of the firstimpurity type in the moveable member is greater than 10¹⁹ cm⁻³; removingsubstantially all of the dopant carrier layer; and providing a coverover the moveable member of the micromachined resonator.
 17. The methodof manufacturing of claim 16 wherein the material of the moveable memberof the micromachined resonator is substantially monocrystalline silicon.18. The method of manufacturing of claim 16 wherein transferring atleast the portion of the one or more dopants from the dopant carrierlayer to the moveable member further includes heating the moveablemember and the dopant carrier layer after depositing a dopant carrierlayer on the moveable member and before removing the dopant carrierlayer.
 19. The method of manufacturing of claim 16 wherein theconcentration of the first impurity type in the material of the moveablemember is substantially uniform.
 20. The method of manufacturing ofclaim 16 further including releasing the moveable member of themicromachined resonator from the substrate during or after removingsubstantially all of the dopant carrier layer.